科研之友
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摘要
Compliant mechanisms have great advantages to be used as micropositioning stages for high-precision applications but they are very sensitive to manufacturing tolerances and assembling errors. In this work, a novel compliant stage having 3-PRR kinematic structure and actuated by piezoelectric actuators is introduced. A kinematic modeling based on compliance of the flexible elements and finite element analysis based model have been extracted. It is found out that the experimental results are not compatible with the theoretical results due to the manufacturing, actuator assembly errors. The position control of the mechanism has been achieved using sliding mode control which is a great method for unpredictable varying parameters in the system. Sliding mode observer has also been used for the hysteresis and nonlinearities of the piezoelectric actuators. Experimental models for each actuation axis have been used as the nominal models for the sliding mode observer. In order to see the advantage of the control method simple PID control has also been implemented. It is seen that sliding mode control with sliding mode observer using experimental models reduces the position tracking errors to the range of the accuracy of our available measurement.
- 出版日期2016
