Acetylene Deposition Using Atmospheric Pressure Weakly Ionized Plasma

作者：Wemlinger Erik C^*; Pedrow Patrick D

来源：IEEE Transactions on Plasma Science, 2014, 42(6): 1602-1606.

DOI：10.1109/TPS.2014.2320268

• Atmospheric pressure plasma
• corona discharges
• nonthermal plasma
• streamers
• surface treatment
• thin films
• weakly ionized plasma

Atmosphere pressure weakly ionized plasma has been utilized to polymerize gas phase acetylene in a needle-to-plane electrode configuration. The approach used in this research is novel as it did not rely on complicated power supplies or expensive materials and it results in a needle-to-ground geometry. The activated acetylene molecules in an argon environment were deposited onto a substrate to grow thin plasma-polymerized acetylene films. Using independent methods, a deposition rate between 2.2 and 23 nm/s was measured when an average free electron power of 94 mW was used.

• 出版日期2014-6