Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

作者：Guo Z; Tian Y^*; Liu C; Wang F; Liu X; Shirinzadeh B; Zhang D

来源：Robotics and Computer-Integrated Manufacturing, 2015, 32: 93-105.

DOI：10.1016/j.rcim.2014.10.003

• Flexure-based mechanism
• Static analysis
• Dynamic analysis
• Optimization design
• Hybrid control

A 3-DOF (X-Y-theta(z)) planar flexure-based mechanism is designed and monolithically manufactured using Wire Electro-Discharge Machining (WEDM) technology. The compact flexure-based mechanism is directly driven by three piezoelectric actuators (PZTs) through decoupling mechanisms. The orthogonal configuration in the x and y directions can guarantee the decoupling translational motion in these axes. The rotational motion and translational displacement in the x direction can be decoupled by controlling the piezoelectric actuators in the x axis with the same displacement values in same and opposite motion directions, respectively. The static and dynamic models of the developed flexure-based mechanism have been developed based on the pseudo-rigid-body model methodology. The mechanical design optimization is conducted to improve the static and dynamic characteristics of the flexure-based mechanism. Finite Element Analyses (FEA) are also carried out to verify the established models and optimization results. A novel hybrid feedforward/feedback controller has been provided to eliminate/reduce the nonlinear hysteresis and external disturbance of the flexure-based mechanism. Experimental testing has been performed to examine the dynamic performance of the developed flexure-based mechanism.

• 出版日期2015-4
• 单位天津大学