A 240-GHz Wideband Ridged Waveguide Filter Based on MEMS Process

作者：Ding, Jiangqiao^*; Hu, Jie; Liu, Dong; Wang, Daowei; Shi, Shengcai; Wu, Wen

来源：Journal of Infrared Millimeter and Terahertz Waves, 2017, 38(3): 283-291.

DOI：10.1007/s10762-016-0332-3

• THz
• Wideband
• Ridged waveguide
• BPF
• MEMS

Terahertz (THz) bandpass filter (BPF) is one of important components in some detectors for astronomical observations. In this paper, a BPF with a relative bandwidth of 50% centered at 240 GHz is presented. This wideband BPF is made up of six ridged waveguide resonators and developed by silicon-based micro-electro-mechanical systems (MEMS) process. The transmission response of the filter is measured by a quasi-optical setup incorporating a sensitive superconducting mixer, and the result is in good agreement with the simulated one. Details of the design, simulation, and measurement are discussed in this paper.

• 出版日期2017-3
• 单位南京理工大学; 中国科学院紫金山天文台