An accurate and simple universal curve for the energy-dependent electron inelastic mean free path

作者：Seah M P^*

来源：Surface and Interface Analysis, 2012, 44(4): 497-503.

DOI：10.1002/sia.4816

• attenuation lengths
• elements
• IMFP
• inelastic mean free path
• inorganic materials
• organic materials

The values of inelastic mean free paths (IMFPs) calculated from optical data for the three material categories of elements, inorganic compounds and organic compounds are re-assessed to provide a simple equation giving an estimate of the IMFP, knowing only the identities of the elements in an analysed layer and the atomic density of that layer. This simple equation is required for quantification of the thicknesses for layers of mixed elements in which the required parameters for use of the popular equation, TPP-2M, are insufficiently known. It describes the published values, calculated from optical data for energies above 100 eV, to a similar root mean square (RMS) deviation as that for TPP-2M in the three material categories. The RMS deviation for all three categories averages 8.4%, provided the inorganic data are 'corrected' for the published sum rule errors. If, in an analysed layer, only elements are identified and the atomic density is unknown, i.e. only the average Z value of the layer is known, a simpler relation is provided for the IMFP in monolayers with only one unknown parameter Z that exhibits an RMS deviation from the IMFPs calculated from optical data of 11.5%.

• 出版日期2012-4