科研之友
微信
新浪微博
Facebook
分享链接
摘要
A method for determining the dry coefficient of friction (COF) of chemical mechanical planarization conditioner discs for purposes of quality assessment and problem diagnostics was presented. First, two "known good" (K1 and K2) and one "known bad" (K3) diamond discs were characterized. Results showed that the COF of K3 was significantly higher than K1 and K2 thus suggesting that the COF can be potentially used as a screening metric for disc quality. Second, the study confirmed the existence of a correlation between dry COF and the total area of the furrows generated by the active diamonds such that the COF increased with the total area of the furrows.
- 出版日期2010
