Development of a TES Microcalorimeter with a Mushroom Shaped Absorber Deposited on an Insulating Layer in an Overhang Region

作者：Maehata K^*; Iyomoto N; Yasumune T; Maeda M; Matsumura S; Hara T; Mitsuda K; Yamasaki N; Tanaka K

来源：Journal of Low Temperature Physics, 2012, 167(3-4): 226-231.

DOI：10.1007/s10909-012-0469-y

• TES microcalorimeter
• Mushroom shaped absorber

A 3x3+1 superconducting transition-edge sensor (TES) microcalorimeter-array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 mu m thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 mu mx350 mu m and 330 mu mx330 mu m, respectively. The absorber stem of 150 mu mx150 mu m in the cross sectional area is deposited on the center of the TES surface. A Ta2O5 insulating layer of 0.1 mu m thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an Fe-55 source.

• 出版日期2012-5