Uniformity of postprocessing of dense nanotube arrays by neutral and ion fluxes

作者：Levchenko I^*; Ostrikov K; Tam E

来源：Applied Physics Letters, 2006, 89(22): 223108.

DOI：10.1063/1.2388941

The advantages of using low-temperature plasma environments for postprocessing of dense nanotube arrays are shown by means of multiscale hybrid numerical simulations. By controlling plasma-extracted ion fluxes and varying the plasma and sheath parameters, one can selectively coat, dope, or functionalize different areas on nanotube surfaces. Conditions of uniform deposition of ion fluxes over the entire nanotube surfaces are obtained for different array densities. The plasma route enables a uniform processing of lateral nanotube surfaces in very dense (with a step-to-height ratio of 1:4) arrays, impossible via the neutral gas process wherein radical penetration into the internanotube gaps is poor.

• 出版日期2006-11-27