Fabrication of carbon nanofibers using only ion beam irradiation to glassy carbon

作者：Okumoto Takashi^*; Taniguchi Jun; Kamiya Yasuhiro

来源：Microelectronic Engineering, 2011, 88(8): 1832-1835.

DOI：10.1016/j.mee.2011.02.062

• Carbon nanofibers
• Multi-wall carbon nanotube
• Ion beam
• Glassy carbon

Carbon nanofibers (CNFs) and carbon nanotubes (CNTs) are new carbon-based materials. However, the production of CNFs and CNTs is very difficult due to the complicated processes and high temperature involved. Therefore, a method of fabrication is required that enables high throughput at a low cost.
Our previous study reported that oxygen ion beam energy of 500 eV applied to glassy carbon (GC) forms the finest pitch conical anti-reflection (AR) structures, and that an irradiation time of more than 24 min fabricates conical AR structures with heights of more than 250 nm. After the fabrication of the AR structures, irradiation by an argon ion (Ar(+) beam changes the surface morphology, and oblique angle irradiation can form CNFs. Thus, we carried out oblique Ar(+). beam irradiation on conical carbon protrusions on GC fabricated by oxygen ion beam irradiation. As a result, CNFs have been formed using oxygen and argon ion beam irradiation at room temperature. In addition, multi-wall CNT can be obtained by two-step ion beam irradiation.

• 出版日期2011-8