Preparation of needle-like structured amorphous carbon films and their field emission properties

作者：Akasaka Hiroki^*; Iwashige Kei; Saito Takao; Yang Xudong; Hatta Akimitsu; Ohtake Naoto

来源：New Diamond and Frontier Carbon Technology, 2006, 16(4): 221-232.

• pulse plasma
• chemical vapor deposition (CVD)
• amorphous carbon film
• needle-like
• structure
• Raman scattering spectroscopy
• field emission
• Fowler-Nordheim plot

Needle-like structured hydrogenated amorphous carbon (a-C:H) films were synthesized by a simple process involving pulse plasma chemical vapor deposition (CVD) and a unique substrate geometry. A separate die having five holes of 2.0 mm in diameter was used to fabricate the a-C:H films. A substrate was sandwiched on each side by a separated die along a plane including the center axes of the five holes. The a-C films were deposited on the sidewalls of the five half-cylinders. The surface of the deposited a-C:H films consisted of needle-like grains. The needle density in the a-C:H films decreased with increasing distance from the upper surface of the die. The needle density increased with introducing Ar with C2H2 during deposition. The average cluster size of the sp(2)-bonded carbon network was found to be decreased by Ar addition during deposition. The Fowler-Nordheim tunneling phenomenon was observed for the a-C:H films, indicating that field emission occurred from the a-C:H films with needle-like structures. The emission properties depended on needle density and the average carbon cluster size of the sp(2)-bonded carbon network in the a-C:H films.

• 出版日期2006