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摘要
By the mathematic models of flexible hinge, the accurate relationship between the phase-shifting and pressure acting on the hinge is deduced and verified by experimental results. Through the optimization of the geometric parameter of flexible hinge, a phase-shifting generator is developed to determine the length of an object precisely by interferometry. The experiments show that the triple phase-shifting produced using this generator is up to 1 mu m. With this generator, an example for the application in length measurement is introduced. The result shows the length uncertainty is 0.5 nm when the temperature uncertainty is limited in 2 mK. This paper provides a novel technique to measure the dimension of an object, especially to the diameter of a silicon sphere for Avogadro constant project.
- 出版日期2012-4
- 单位中国计量科学研究院
