Deposition of High-Efficiency Microcrystalline Silicon Solar Cells Using SiF4/H-2/Ar Mixtures

作者：Dornstetter Jean Christophe^*; Kasouit Samir; Roca i Cabarrocas Pere

来源：IEEE Journal of Photovoltaics, 2013, 3(1): 581-586.

DOI：10.1109/JPHOTOV.2012.2221683

• Microcrystalline silicon
• silicon tetrafluoride
• solar cells
• thin films

In this paper, we present results on microcrystalline silicon solar cells that are deposited from SiF4/H-2/Ar mixtures, on which efficiencies exceeding 9% have already been obtained. Structural characterizations of the cells indicate a fully crystalline material with no preferential crystallographic orientation. This suggests that, as opposed to microcrystalline silicon cells deposited using silane, an amorphous phase is not required to passivate defects at column boundaries. These results are discussed in light of the specific growth mechanism and structural properties associated with film deposition using SiF4. They pave the way toward low-cost, high-performance polycrystalline cells on glass.

• 出版日期2013-1