Nanostructured surfaces investigated by quantitative morphological studies

作者：Perani Martina; Carapezzi Stefania; Mutta Geeta Rani; Cavalcoli Daniela

来源：Nanotechnology, 2016, 27(18): 185703.

DOI：10.1088/0957-4484/27/18/185703

• atomic force microscopy
• surface roughness
• height-height correlation function
• grain size analysis
• PECVD silicon oxy-nitride
• MaCE Si nanowires
• NH3-MBE grown InGaN/GaN QW

The morphology of different surfaces has been investigated by atomic force microscopy and quantitatively analyzed in this paper. Two different tools have been employed to this scope: the analysis of the height-height correlation function and the determination of the mean grain size, which have been combined to obtain a complete characterization of the surfaces. Different materials have been analyzed: SiOxNy, InGaN/GaN quantum wells and Si nanowires, grown with different techniques. Notwithstanding the presence of grain-like structures on all the samples analyzed, they present very diverse surface design, underlying that this procedure can be of general use. Our results show that the quantitative analysis of nanostructured surfaces allows us to obtain interesting information, such as grain clustering, from the comparison of the lateral correlation length and the grain size.

• 出版日期2016-5-6