Detection of Interference Phase by Digital Computation of Quadrature Signals in Homodyne Laser Interferometry

作者：Rerucha Simon^*; Buchta Zdenek; Sarbort Martin; Lazar Josef; Cip Ondrej

来源：Sensors, 2012, 12(10): 14095-14112.

DOI：10.3390/s121014095

• laser interferometry
• optical metrology
• homodyne detection
• digital signal processing

We have proposed an approach to the interference phase extraction in the homodyne laser interferometry. The method employs a series of computational steps to reconstruct the signals for quadrature detection from an interference signal from a non-polarising interferometer sampled by a simple photodetector. The complexity trade-off is the use of laser beam with frequency modulation capability. It is analytically derived and its validity and performance is experimentally verified. The method has proven to be a feasible alternative for the traditional homodyne detection since it performs with comparable accuracy, especially where the optical setup complexity is principal issue and the modulation of laser beam is not a heavy burden (e.g., in multi-axis sensor or laser diode based systems).

• 出版日期2012-10