Behavior of rapid thermal annealed ZnO : P films grown by pulsed laser deposition

作者：Kim H S; Pearton S J; Norton D P^*; Ren F

来源：Journal of Applied Physics, 2007, 102(10): 104904.

DOI：10.1063/1.2815676

The transport properties of as-deposited and rapid thermal annealed phosphorus-doped ZnO films grown by pulsed laser deposition are reported. As-grown ZnO:P samples showed n-type characteristics, presumably due to the formation of antisite P-Zn defects. Rapid thermal annealing yielded a carrier-type conversion from n- to p-type for the ZnO:P films grown at similar to 700 degrees C; samples grown at substantially lower or higher temperatures tended to remain n-type even after the thermal annealing process. The properties and behavior of the n-to-p conversion are most consistent with the formation of P-Zn-2V(Zn) as the active acceptor state. Variable magnetic field Hall measurements confirmed the p-type behavior. Phosphorus doping concentrations in the range of 0.5-1.0 at. % were considered, with evidence for P segregation in the higher phosphorus concentrations.

• 出版日期2007-11-15