摘要

A pulsed dielectric barrier discharge (DBD) has been investigated in a wide range of experimental conditions with the purpose of optimization for XeCl excimer radiation. For that the following operation parameters had been considered: four different lamps of coaxial geometry with gas gaps in the range of 1.3 - 6.5 mm; gas mixtures of xenon and chlorine containing admixtures of 1%, 2% and 4% Cl(2) at total filling pressures between 5 mbar and 600 mbar; voltage rise times of 20 - 50 ns and voltage amplitudes of up to 12 kV. A maximum radiation pulse energy of 1.8 mu J has been detected at 310 +/- 10 nm with an estimated radiation decay by three orders of magnitude within about 5 mu s. It was shown that the minimization of the voltage rise time is essential for enhancing the radiation pulse energy. Furthermore a correlation between the discharge geometry and the optimum pressure for maximum radiation output was observed. The decay characteristics of the excimer emission provides evidence of the harpoon reaction being the main channel of XeCl formation under our operation conditions.

  • 出版日期2011-10