A new method for the extraction of flat-band voltage and doping concentration in Tri-gate Junctionless Transistors

作者：Jeon D Y^*; Park S J; Mouis M; Barraud S; Kim G T; Ghibaudo G

来源：Solid-State Electronics, 2013, 81: 113-118.

DOI：10.1016/j.sse.2012.11.011

• Junctionless Transistors (JLTs)
• Extraction method
• Flat-band voltage (V-fb)
• Doping concentration (N-d)
• Effective width (W-eff)
• 2D numerical simulation
• Sidewall accumulation current (I-d_side)

A new method for the extraction of flat-band voltage (V-fb) and channel doping concentration (N-d) in Tri-gate Junctionless Transistors (JLTs) is presented. The new method, based on the relationship between the top-effective width (W-top_eff) in accumulation and the effective width (Weir) in partial depletion, enables the extraction of V-fb, and Nd of JLT devices (here as approximate to 0.61 V and approximate to 6.4 x 10(18) cm(-3), respectively). The validity of the new method is also proved by 2D numerical simulations. Furthermore, it is emphasized that the sidewall accumulation current (I-d_side) behavior of Tri-gate JLT devices is found to decrease dramatically near Vfb, allowing an estimation of the V-fb position of JLT devices.

• 出版日期2013-3
• 单位中国地震局