Hydrogenated amorphous silicon solar cell on glass substrate patterned by hexagonal nanocylinder array

作者:Tu Wei Chen*; Chang Yi Tsung; Yang Chieh Hung; Yeh Dan Ju; Ho Chung I; Hsueh Chun Yuan; Lee Si Chen
来源:Applied Physics Letters, 2010, 97(19): 193109.
DOI:10.1063/1.3515853

摘要

The hydrogenated amorphous silicon thin film solar cell fabricated on the glass substrate patterned by hexagonal nanocylinder array prepared by self-assembled SiO2 nanoparticles and nanosphere lithography was investigated. It is demonstrated that the short-circuit current of the patterned solar cell with 65 nm depth nanocylinder increases from 12.3 to 14.4 mA/cm(2), and the efficiency increases from 5.18% to 6.59% as compared to the flat solar cell. These phenomena suggest that both effective light trapping and localized surface plasmon lead to significant improvement of light absorption in amorphous silicon solar cells.