All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

作者：Liu, Yu; Sun, Yue; Yi, Yun-Ji^*; Tian, Liang; Cao, Yue; Chen, Chang-Ming; Sun, Xiao-Qiang; Zhang, Da-Ming

来源：Chinese Physics B, 2017, 26(12): 124215.

DOI：10.1088/1674-1056/26/12/124215

• integrated optics devices
• polymer waveguides
• sensors
• microstructure fabrication

We present an all polymer asymmetric Mach-Zehnder interferometer (AMZI) waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 mu m in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between -80.36 dB and -10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.30 x 10(-6) RIU (RIU: refractive index unit) and 1.82 x 10(-5) RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.

• 出版日期2017-12
• 单位吉林大学; 集成光电子学国家重点实验室