A method for evaluations on the radiation trapping in an inductively coupled plasma in argon

作者：Scharwitz Christian^*; Makabe Toshiaki

来源：Journal of Applied Physics, 2009, 106(11): 113304.

DOI：10.1063/1.3262566

• argon
• plasma diagnostics

One of the general challenges for the evaluation and interpretation of optical emission spectroscopy measurements is the occurrence of radiation trapping, which is also named self-absorption or opacity. A convenient technique to treat radiation trapping is the introduction of a parameter, which is called escape factor and gives a measure for the amount of radiation trapping. In this paper evaluations on the concept of escape factors are presented for an inductively coupled plasma in argon. Especially, the strong argon line at 811.53 nm, which arises from the transition of 2p(9)-1s(5), is under consideration. To estimate escape factors for this line, a particular method is proposed and presented here. First experimental results are obtained under the restrictive assumptions that transitions into the resonant levels 1s(2) and 1s(4) are sufficiently optically thin and ratios of population densities are constant.

• 出版日期2009-12-1