摘要

CoFe2O4/Pb(Zr0.53Ti0.47)O-3 (CFO/PZT) magnetoelectric composite thin films of 2-2 type structure have been prepared onto Pt/Ti/SiO2/Si substrate by a sol-gel process and spin coating technique. The optimal annealing process of composite thin films was determined by using X-ray diffraction (XRD) and differential scanning calorimetry (DSC). It is found that the amount of the citric acid and concentration of CFO starting precursor solution have great impact on morphologies of composite thin films. Subsequent scanning electron microscopy (SEM) investigations show that the prepared thin films exhibit good morphologies and compact structure, and cross-sectional micrographs clearly display a multilayered nanostructure of multilayered thin films. The purpose of this work is to determine the optimal annealing processes of composite thin films and to prepare magnetoelectric composite thin films with good microstructure. It is shown that the films exhibit both good magnetic and ferroelectric properties, as well as a magnetoelectric effect.