Movement measurement with a grating interferometer using sinusoidal phase-modulation

作者：Huan Hai^*; Sasaki Osami; Suzuki Takamasa

来源：Optics Communications, 2006, 267(2): 341-346.

DOI：10.1016/j.optcom.2006.06.038

• movement measurement
• grating interferometer
• sinusoidal phase-modulation

Movements of a surface profile are measured with a two-grating interferometer using sinusoidal phase-modulation. Since sinusoidal phase-modulating (SPM) interferometry can record a phase change due to the movement of an object in the interference signal, the SPM interferometer is suitable for measuring the movement of the object. Some experiments show that the two-grating interferometer can measure a sinusoidal vibration with amplitude of several tens of microns and a step movement with a magnitude of several microns.

• 出版日期2006-11-15