科研之友
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摘要
This paper reports an investigation into the ability of the air supply in non-unidirectional cleanrooms to aid recovery from episodes of airborne contamination, and minimise airborne contamination at important locations. The ISO 14644-3 (2005) recovery test, which measures the rate of decay of test particles, was assessed and a reinterpretation of the test results suggested. This allowed air change effectiveness indices to be calculated and used to evaluate the ventilation effectiveness of the cleanroom%26apos;s air supply. Air change effectiveness indices were measured in various designs of cleanrooms, and reasons for deviations in the value of the indices investigated.
- 出版日期2014-12
